Effect of noble gas ions on the synthesis of c-BN by ion beam assisted deposition
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference13 articles.
1. Characterization and growth mechanisms of boron nitride films synthesized by ion‐beam‐assisted deposition
2. The structure and properties of ion‐beam‐synthesized boron nitride films
3. Preparation of cubic boron nitride film by activated reactive evaporation with a gas activation nozzle
4. Phase control of cubic boron nitride thin films
5. Nuclear reaction analyses of boron nitride films deposited by ion beam based techniques
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1. Ion Beam-Assisted Deposition;Low-Energy Ion Irradiation of Materials;2022
2. Heteroepitaxial growth of cubic boron nitride films on diamond(001) substrates and theirn-type doping;SPIE Proceedings;2016-02-26
3. Method for Simulating the Thickness Distribution of a Cubic Boron Nitride Film Deposited on a Curved Substrate using Ion-beam-assisted Vapor Deposition;Physics Procedia;2012
4. Parameter spaces for the nucleation and the subsequent growth of cubic boron nitride films;Thin Solid Films;2003-01
5. Superhard coatings in C-B-N systems;Handbook of Thin Films;2002
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