Oxygen exposure effect on sputtering yield and angular distribution for light-ion irradiation of polycrystalline molybdenum
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference16 articles.
1. Sputtering by Particle Bombardment II;Roth,1983
2. On the influence of reactive gases on sputtering and secondary ion emission
3. Sputter-erosion and impurity emission from titanium and vanadium at low-energy ion bombardment
4. Dependence of light-ion sputtering yields of iron on ion fluence and oxygen partial pressure
5. Velocity distributions of the metal atoms sputtered from oxygen and nitrogen covered Ti- and Al-surfaces
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1. Analytical description of the sputtering yields of silicon bombarded with normally incident ions;Physical Review B;2003-12-29
2. Fundamental aspects of SNMS for thin film characterization: experimental studies and computer simulations;Thin Solid Films;1996-01
3. Energy and angular distributions of sputtered particles;International Journal of Mass Spectrometry and Ion Processes;1994-12
4. Light-Ion sputtering yield measurements of Ti AND TiC under O2 exposure at high temperature;Journal of Nuclear Materials;1989-04
5. Metal-atom concentration formation in a hollow-cathode discharge;Soviet Physics Journal;1989-03
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