Ion beam synthesis of thin buried layers of SiO2 in silicon-Reference-Cited by-同舟云学术

Ion beam synthesis of thin buried layers of SiO2 in silicon

Author:

Hemment PLF,Reeson KJ,Kilner JA,Chater RJ,Marsh C,Booker GR,Celler GK,Stoemenos J

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference17 articles.

1. J R Davis, M R Taylor, G D T Spiller, P J Skevingtion and P L F Hemment, Appl Phys Letts, submitted for publication.

3. IEEE SOS/SOI Workship;Davis,1985

5. Mat Res Soc Meeting;Margail,1985

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