Analysis of GeH4 and GeF4 as gaseous feed materials for germanium implantation
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
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1. Germanium and Germanium Compounds;Kirk-Othmer Encyclopedia of Chemical Technology;2011-07-15
2. Determination of impurities in germanium tetrafluoride by IR spectroscopy and gas chromatography;Inorganic Materials;2010-10
3. Determination of C1–C4 hydrocarbons and sulfur hexafluoride in high-purity germanium tetrafluoride of natural and isotopically enriched composition using gas chromatography;Inorganic Materials;2009-12
4. Cationic germanium fluorides;International Journal of Mass Spectrometry;2006-11
5. Cationic Germanium Fluorides: A Theoretical Investigation on the Structure, Stability, and Thermochemistry of GeFn/GeFn+ (n = 1−3);The Journal of Physical Chemistry A;2006-03-16
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