Growth and characterization of yttrium oxide thin layers on silicon deposited by yttrium evaporation in atomic oxygen
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference20 articles.
1. Heteroepitaxial growth of Y2O3films on silicon
2. Growth of Buffer Layers on Si Substrate for High-TcSuperconducting Thin Films
3. Orientation relationships of epitaxial oxide buffer layers on silicon (100) for high‐temperature superconducting YBa2Cu3O7−xfilms
4. Growth and dielectric characterization of yttrium oxide thin films deposited on Si by r.f.-magnetron sputtering
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