Direct quantitative analysis of phthalate esters as micro-contaminants in cleanroom air and wafer surfaces by auto-thermal desorption–gas chromatography–mass spectrometry
Author:
Publisher
Elsevier BV
Subject
Organic Chemistry,General Medicine,Biochemistry,Analytical Chemistry
Reference26 articles.
1. Preoxidation Si cleaning and its impact on metal oxide semiconductor characteristics
2. Very high quality thin gate oxide formation technology
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4. Impact of Organic Contaminants from the Environment on Electrical Characteristics of Thin Gate Oxides
5. Influence of Organic Contamination on Silicon Dioxide Integrity
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