Electroplating of low stress permalloy for MEMS
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference14 articles.
1. Future of microelectromechanical systems (MEMS);Bao;Sens Actuators A,1996
2. Micromachined magnetic actuators using electroplated permalloy;Liu;IEEE Trans Magn,1999
3. MEMS and Si micromachined circuits for high-frequency applications;Katehi;IEEE Trans Theor Tech,2002
4. Synchrotron radiation micro lithography and etching (SMILE) for MEMS fabrication;Sugiyama,2001
5. Development of surface micromachined magnetic actuators using electroplated permalloy;Liu;Mechatromics,1998
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