Influence of CrAlN layers on the microstructure, thermal stability, oxidation and corrosion resistance of AlN/CrAlN multilayers
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Elsevier BV
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4. Phase composition of polycrystalline HfNx (0.45≤ x≤1.60) and effects of low-energy ion irradiation on microstructure, texture, and physical properties;Seo;J. Vac. Sci. Technol. A,2023
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