Noncontacting photothermal radiometry of SiO2/Si MOS capacitor structures
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference20 articles.
1. Non-contacting determination of carrier lifetime and surface recombination velocity using photothermal radiometry
2. Non-destructive, non-contact characterization of silicon using photothermal radiometry
3. Lock‐in rate‐window thermomodulation (thermal wave) and photomodulation spectrometry
4. Photothermal rate‐window spectrometry for noncontact bulk lifetime measurements in semiconductors
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