Leff extraction for sub-100 nm MOSFET devices

Author:

Ye Qiuyi,Biesemans Serge

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference7 articles.

1. A new ‘shift and ratio’ method for MOSFET channel-length extraction;Taur;IEEE Electron Dev. Lett.,1992

2. Accurate determination of channel length, series resistance and junction doping profile for MOSFET optimization in deep sub+−micron technologies;Biesemans;VLSI Symp.,1996

3. A new approach to determine the effective channel length and the drain-and-source series resistance of miniaturized MOSFET’s;Guo;IEEE Trans. Electron Dev.,1994

4. Ye Qiuyi, Li Yujun, Tonti W, Berry W, Parks C, Mohler R. Improving the accuracy of “shift and ratio”: channel length extraction method in deep submicron technology. IEEE IRW Final Report 2000, 2000. p. 102–3

5. MOS capacitance measurements for high-leakage thin dielectrics;Yang;IEEE Trans. Electron Dev.,1999

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