Author:
Han Jie,Cheng Ping,Wang Hong,Zhang Congchun,Zhang Jiubin,Wang Yan,Duan Li,Ding Guifu
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference8 articles.
1. Diehl W. Platinum thin film resistors as accurate and stable temperature sensors. In: Proc. Sensor׳82—Transducer Technology and Temperature Measurement; 1982. p. 89–101.
2. Electrical and thermal properties of platinum thin films prepared by DC magnetron sputtering for micro-heater of microsensor applications after CMP process;Lee;Solid State Phenom,2007
3. Stability of thin platinum films implemented in high-temperature microdevices;Tiggelaar;Sens Actuators A: Phys,2009
4. Evaluation of platinum as a structural thin film material for RF-MEMS devices;Ekkels;J Micromech Microeng,2009
5. Stabilized platinum electrodes for ferroelectric film deposition using Ti, Ta and Zr adhesion layers;Maeder;Jpn J Appl Phys,1998
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