The effects of oxygen partial pressure on BST thin films deposited on multilayered bottom electrodes
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference11 articles.
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3. Effects of annealing temperature on the photoluminescence of RF sputtered Barium titanate thin films;Materials Science in Semiconductor Processing;2015-02
4. Stoichiometry and phase purity control of radio frequency magnetron sputter deposited Ba0.45Sr0.55TiO3 thin films for tunable devices;Journal of Applied Physics;2013-11-07
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