Chopping effect on the crystallinity of ZnO films prepared by a r.f. planar magnetron sputtering method
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference20 articles.
1. Acoustic bulk wave composite resonators
2. High-speed optical signal processing potential of grating-coupled waveguide filters
3. dc triode sputtered zinc oxide surface elastic wave transducers
4. Transparent and highly conductive films of ZnO prepared by rf reactive magnetron sputtering
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