Epitaxial Y2O3 film growth on an oxidized Si surface-Reference-Cited by-同舟云学术

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Epitaxial Y2O3 film growth on an oxidized Si surface

Published:2002-01 Issue:1-2 Volume:402 Page:38-42
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Cho M.-H.,Ko D.-H.,Choi Y.K.,Lyo I.W.,Jeong K.,Whang C.N.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference17 articles.

1. Yttrium oxide/silicon dioxide: a new dielectric structure for VLSI/ULSI circuits

2. IEDM Technical Digest;Hu,1985

3. Excimer laser ablated barium strontium titanate thin films for dynamic random access memory applications

4. Giant Electric Field Effect on Al/ BaTiO$_{\bf 3}$/ (Y$_{\bf 0.6}$Pr$_{\bf 0.4}$)Ba$_{\bf 2}$Cu$_{\bf 3}$Oy Structures

5. Growth of Buffer Layers on Si Substrate for High-TcSuperconducting Thin Films

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1. Samarium Oxide and Samarium Oxynitride Thin Film as Alternative Gate Oxide on Silicon Substrate;Reference Module in Materials Science and Materials Engineering;2017

2. Effects of Oxygen-Deficient Ambience Annealing on Polycrystalline Y₂O₃ Film;Advanced Materials Research;2011-05

3. Transmission electron microscopy studies on structure and defects in crystalline yttria and lanthanum oxide thin films grown on single crystal sapphire by molecular beam synthesis;Philosophical Magazine;2010-03-21

4. The effect of Si surface nitridation on the interfacial structure and electrical properties of (La2O3)0.5(SiO2)0.5 high-k gate dielectric films;Applied Surface Science;2009-10

5. Nanometer thick single crystal Y2O3 films epitaxially grown on Si (111) with structures approaching perfection;Applied Physics Letters;2008-02-11

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