The effect of ion implantation energy and dosage on the microstructure of the ion beam synthesized FeSi2 in Si-Reference-Cited by-同舟云学术

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The effect of ion implantation energy and dosage on the microstructure of the ion beam synthesized FeSi2 in Si

Published:2005-12 Issue: Volume:124-125 Page:444-448
ISSN:0921-5107
Container-title:Materials Science and Engineering: B
language:en
Short-container-title:Materials Science and Engineering: B

Author:

Chong Y.T.,Li Q.,Chow C.F.,Ke N.,Cheung W.Y.,Wong S.P.,Homewood K.P.

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference17 articles.

1. JCPDF data file, International Center for Diffraction Data (ICDD), 74-1285.

2. A silicon/iron-disilicide light-emitting diode operating at a wavelength of 1.5 μm

3. Optical properties of semiconducting iron disilicide thin films

4. Microstructure of β-FeSi2 thin films prepared by pulsed laser deposition

5. Epitaxial orientation of β-FeSi2/Si heterojunctions obtained by RTP chemical vapor deposition

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Observation of room-temperature superparamagnetic behavior of Fe5Si3 nanocrystals synthesized via 50 keV Fe ion implantation in silicon;Applied Physics A;2020-02-26

2. Endotaxially stabilized B2-FeSi nanodots in Si (100) via ion beam co-sputtering;Applied Physics Letters;2014-04-21

3. Correlation between impurities in Fe–Si amorphous layers synthesized by Fe implantation and photoluminescence property of β-FeSi2 precipitates in Si;Journal of Luminescence;2008-11

4. Controllable growth of α- and β-FeSi2thin films on Si(100) by facing-target sputtering;physica status solidi (a);2007-10

5. Photoresponse of β-FeSi2 precipitates in a silicon waveguide;LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings;2007-10

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