Author:
Tamminga Y.,Willemsen M.F.C.,Van Silfhout R.
Cited by
4 articles.
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1. A high-resolution electrostatic spectrometer for the investigation of near-surface layers in solids by high-resolution Rutherford backscattering with MeV ions;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1992-02
2. On the determination of dopant/carrier distributions;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1992-01
3. Diagnostic Techniques;Microelectronic Materials and Processes;1989
4. Ion beam crystallography of surfaces and interfaces;Surface Science Reports;1985-12