Author:
Himmerlich M.,Yanev V.,Opitz A.,Keppler A.,Schaefer J.A.,Krischok S.
Subject
Materials Chemistry,Polymers and Plastics,Mechanics of Materials,Condensed Matter Physics
Reference33 articles.
1. Plasma chemistry of fluorocarbons as related to plasma etching and plasma polymerization;Kay;Top Curr Chem,1980
2. Plasma polymerization;Yasuda,1985
3. Plasma deposition, treatment, and etching of polymers: the treatment and etching of polymers;d'Agostino,1990
4. Fluorocarbon high-density plasmas. I. Fluorocarbon film deposition and etching using CF4 and CHF3;Oehrlein;J Vac Sci Technol A,1994
5. Plasma surface modification and plasma polymerization;Inagaki,1996
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