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Simulation of dry screw vacuum pumps based on chamber model and thermal resistance network

  • Published:2022-07 Issue: Volume:211 Page:118460
  • ISSN:1359-4311
  • Container-title:Applied Thermal Engineering
  • language:en
  • Short-container-title:Applied Thermal Engineering

Author:

Li Dantong,He Zhilong,Wang Chuang,Sun Shizhong,Ma Kai,Xing Ziwen

Funder

National Key Research and Development Program of China

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Energy Engineering and Power Technology

Reference27 articles.

1. Study on the tooth profile for the screw claw-type pump;Hsieh;Mech. Mach. Theory,2008

2. Research of a novel eccentric involute rotor and its performance analysis for twin-screw vacuum pumps;Wang;Vacuum,2020

3. Dynamic characteristics modelling and analysis for dry screw vacuum pumps;Dantong;Vacuum,2022

4. A novel tilt form grinding method for the rotor of dry vacuum pump;Zheng-Xiang;Mech. Mach. Theory,2015

5. Dry vacuum pumps for semiconductor processes: Guidelines for primary pump selection;Lessard;J. Vacuum Sci. Technol. A Vacuum Surf. Films,2000
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