Manual cleaving of anodically bonded silicon/glass wafers

Author:

Robaina R.R.,López M.J.,Plaza J.

Publisher

Elsevier BV

Subject

General Medicine

Reference5 articles.

1. The next Step in Assembly and Packaging: System Level Integral in the package (SiP). White Paper on System Level Integration, International technology Roadmap for Semiconductors (ITRS); 2008. Available on: http://www.itrs.net/Links/2007ITRS/LinkedFiles/AP/AP_Paper.pdf.

2. D. I. Pomerantz. U.S. Patent No. 3 397 278, U.S. Patent No. 2 417 459; 1968.

3. Ganesh VP, Lee C. Overview and emerging Challenges in mechanical dicing of silicon wafers. Electronic packaging technology conference; 2006. Available on: http://ieeexplore.ieee.org/stamp/stamp.jsp?arnumber=04147213.

4. Fukumitsu K., Kumagai M., Ohmura E., Morita H., Atsumi K., N. Uchiyama. The Mechanism of Semiconductor Wafer Dicing by Stealth Dicing Technology. Proceedings of LAMP; 2006, p. 06-124.

5. Stowe T. D., Yasumura K., Kenny T. W., Botkin D., Wago K., Rugar D. Attonewton force detection using ultrathin silicon cantilevers. Applied Physics Letters, Vol. 71, Issue 2.DOI:10.1063/1.1195221997; 1997; p. 288-290.

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