Frequency measurements in the 10 μm spectrum of 11BCl3-Reference-Cited by-同舟云学术

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Frequency measurements in the 10 μm spectrum of 11BCl3

Published:1993-04 Issue:2 Volume:34 Page:213-226
ISSN:0020-0891
Container-title:Infrared Physics
language:en
Short-container-title:Infrared Physics

Author:

Godwin D.P.,Butcher R.J.

Publisher

Elsevier BV

Subject

General Engineering

Reference27 articles.

1. Novel vapor pump applied to the synthesis of diboron tetrachloride

2. Tapered etching of aluminum with CHF3/Cl2/BCl3 and its impact on step coverage of plasma-deposited silicon oxide from tetraethoxysilane

3. The Infrared Spectrum of Boron Trichloride

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Plasma process monitoring of BCl3using high-resolution infrared laser absorption spectroscopy;Measurement Science and Technology;2010-07-06

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