A new era of crystallization: advances in polysilicon crystallization and crystal engineering
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
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1. High performance low-temperature poly-Si n-channel TFTs for LCD
2. Structure of As‐Deposited LPCVD Silicon Films at Low Deposition Temperatures and Pressures
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4. Structural characteristics of as-deposited and crystallized mixed-phase silicon films
5. Recrystallization of amorphous silicon films deposited by low‐pressure chemical vapor deposition from Si2H6gas
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