Systematic study of amorphous hydrogenated and fluorinated carbon films
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
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2. Influence of structure evolution on tribological properties of fluorine-containing diamond-like carbon films: From fullerene-like to amorphous structures;Applied Surface Science;2018-11
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