Study on the oxygen concentration reduction in heavily Sb-doped silicon

Author:

Liu Caichi,Wang Hongmei,Li Yangxian,Wang Qinglu,Ren Bingyan,Xu Yuesheng,Que Duanlin

Publisher

Elsevier BV

Subject

Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics

Reference6 articles.

1. Determination of oxygen concentration in heavily Sb-doped Si by means of coincident elastic recoil detection analysis

2. F. Shimura, W. Dyson, J.W. Moody, R.S. Hockett, in: M.W. Bullis, S. Broydo (Eds.), VLSI Science and Technology 1985, The Electrochem. Soc., Pennington, NJ, 1985, p. 507.

3. H. Harada, T. Itoh, N. Ozawa, T. Abe, in: M.W. Bullis, S. Broydo (Eds.), VLSI Science and Technology 1985, The Electrochem. Soc., Pennington, NJ, 1985, p. 526.

4. Handbook of Practical Inorganic Matter Thermodynamic Data;Ye,1981

5. Handbook of Chemistry and Physics;Yao,1985

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