The impact of nitrogen on the defect aggregation in silicon-Reference-Cited by-同舟云学术

The impact of nitrogen on the defect aggregation in silicon

Published:2001-06 Issue:1 Volume:226 Page:19-30
ISSN:0022-0248
Container-title:Journal of Crystal Growth
language:en
Short-container-title:Journal of Crystal Growth

Author:

von Ammon W.,Hölzl R.,Virbulis J.,Dornberger E.,Schmolke R.,Gräf D.

Publisher

Elsevier BV

Subject

Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics

Reference42 articles.

1. Semiconductor Silicon 1990;Abe,1990

2. Nitrogen effect on oxygen precipitation in Czochralski silicon

3. K. Nakai, Y. Inoue, H. Yokota, A. Ikari, J. Takahashi, W. Ohashi, Proceedings of the 3rd International Symposium on Advanced Science and Technology of Silicon Materials, JSPS, 2000, p. 88.

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