Subject
Industrial and Manufacturing Engineering,Mechanical Engineering
Reference12 articles.
1. Contribution of CIRP to the Development of Metrology and Surface Quality Evaluationduring the Last Fifty Years;Peters;Annals of the CIRP,2001
2. Silicon Wafer Thickness Variation Measurements Using the National Institute of Standards and Technology Infrared Interferometer;Schmitz;Optical Engineering,2003
3. ISO Guide to the Expression of Uncertainty in Measurement (1995).
4. ISO 14253 (1998) Geometric product specification (gps)—Inspection by measurement of workpieces and measuring instruments—Part 1: Decision rules for proving conformance with specification.
5. ISO 10110 (2007) Optics and photonics—Preparation of drawings for optical elements and systems—Part 5: Surface form tolerances.
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