Development of an integrated physical vapour deposition and chemical vapour deposition system

Author:

Mundra S.S.,Pardeshi S.S.,Bhavikatti S.S.,Nagras Atul

Funder

All India Council for Technical Education

Publisher

Elsevier BV

Subject

General Medicine

Reference12 articles.

1. Diffusional Contribution to the Total Flow from a Knudsen Cell

2. G. Biasiol, L. Sorba1, Molecular Beam Epitaxy: Principles and Applications, Eds., Edizioni ETS, Pisa, (2001), pp. 66-83.

3. Titus B. Watmon, Anthony C. Ijeh, “Coating cutting tools with hard substance lowers friction co-efficient and improves tool life –A review” Proc. Int. Multiconf. Eng. Comput. Scientist 3 (2010).

4. P.A. Savale, Physical Vapor Deposition (PVD) Methods for Synthesis of Thin Films:A Comparative Study, Scholars Research Library, Archives of Applied Science Research, 8(5) (2016) , pp. 1-8

5. Principles of Physical Vapor Deposition of Thin Films;Harsha,2006

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