Investigating the change in surface acoustic wave velocity due to the change in adhesion of a SU-8 thin film using a SU-8/AlN/Si SAW sensor

Author:

EL Gowini Mohamed M.,Moussa Walied A.

Funder

Auto21 Network of Centres of Excellence

Natural Sciences and Engineering Research Council of Canada (NSERC)

Alberta Government

CMC Microsystems

Publisher

Elsevier BV

Subject

Polymers and Plastics,General Chemical Engineering,Biomaterials

Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Asymptotic formula of Rayleigh wave speed in an orthotropic half-space coated by a thin piezoelectric film;Nondestructive Testing and Evaluation;2023-08-04

2. Fabrication and characterizations of SAW methane sensor based on cryptophane-E membrane;Journal of Ambient Intelligence and Humanized Computing;2018-08-27

3. Nondestructive Testing;Handbook of Adhesion Technology;2018

4. Nondestructive Testing;Handbook of Adhesion Technology;2017

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