1. Fully integrated silicon probes for high-density recording of neural activity;Jun;Nature,2017
2. Neuron-size probes promise better recordings;Servick;Science,2019
3. A silicon-based, three-dimensional neural interface: manufacturing processes for an intracortical electrode array;Campbell;IEEE Trans. Biomed. Eng.,1991
4. Wafer-scale fabrication of penetrating neural microelectrode arrays;Bhandari;Biomed Microdevices,2010
5. A compact integrated device for spatially selective optogenetic neural stimulation based on the Utah Optrode Array;Robert;Proc. SPIE, Optogenetics and Optical Manipulation 2018,2018