Optical analysis of inhomogeneous weakly absorbing thin films by spectroscopic reflectometry: Application to carbon films
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference15 articles.
1. A simple method for the determination of the optical constants n, k and the thickness of a weakly absorbing thin film
2. Refractive Index, Thickness, and Extinction Coefficient of Slightly Absorbing Thin Films
3. Polycrystalline silicon film thickness measurement from analysis of visible reflectance spectra
4. Optical properties of phosphorus‐doped polycrystalline silicon layers
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