Author:
Kirsten M.,Wenk B.,Ericson F.,Schweitz J.Å.,Riethmüller W.,Lange P.
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
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3. Tech. Digest, 4th Int. Conf. Solid-State Sensors and Actuators (Transducers 87);Guckel,1987
4. Thin films for micromechanical sensors
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