Ion-beam sputtering of (Ta2O5)x− (SiO2)1−x composite thin films
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference50 articles.
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3. Stress reduction in ion beam sputtered mixed oxide thin films;Pond;Appl. Opt.,1989
4. Microstructure and composition of composite SiO2/TiO2 thin films;Gluck;J. Appl. Phys.,1991
5. Optical Thin Filters;McLeod,1969
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