Structure and physical properties of plasma-grown amorphous hydrogenated carbon films
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference36 articles.
1. The growth kinetics and properties of hard and insulating carbonaceous films grown in an r.f. discharge
2. Diamond-like carbon films produced in a butane plasma
3. rf‐plasma deposited amorphous hydrogenated hard carbon thin films: Preparation, properties, and applications
4. Electrical characteristics and growth kinetics in discharges used for plasma deposition of amorphous carbon
5. Thermal annealing study of carbon films formed by the plasma decomposition of hydrocarbons
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