Author:
Jain Ajay,Kodas T.T.,Hampden-Smith M.J.
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference18 articles.
1. The Chemistry of Metal CVD,1994
2. Reactive Ion Etching of Copper Films
3. P.M. Schaible and G.C. Schwartz, U.S. Patent No. 4 352 716, 1982.
Cited by
42 articles.
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