Friction coefficient of SiC, TiC and GeC coatings with excess carbon formed by plasma-assisted chemical vapour deposition
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference11 articles.
1. Effect of excess carbon on the hardness of SiC and TiC coatings formed by plasma-assisted chemical vapor deposition
2. Low friction coatings of diamond-like carbon with silicon prepared by plasma-assisted chemical vapor deposition
3. Tribological properties and characterization of diamond-like carbon coatings with silicon prepared by plasma-assisted chemical vapour deposition
4. Tribological and electrical properties of metal‐containing hydrogenated carbon films
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