Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Cited by
108 articles.
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1. Powder metallurgic fabricated plug targets for the synthesis of AlCrSiWN multicomponent coating systems;International Journal of Refractory Metals and Hard Materials;2019-12
2. Silicon etching in a pulsed HBr/O2 plasma. II. Pattern transfer;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2015-05
3. A Foldable Microplasma-Generation Device on a Paper Substrate;Journal of Microelectromechanical Systems;2012-10
4. Sputtering;digital Encyclopedia of Applied Physics;2003-04-15
5. Effects of carbon implantation on the electrical properties of amorphous In2O3 thin film;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2001-11