Author:
Jiang Zhimin,Fang Haisheng,Luo Xiangang,Xu Jianfeng
Funder
National Natural Science Foundation of China
Key Foundation of Hubei Province
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Reference60 articles.
1. RF MEMS: theory, design, and technology;Rebeiz,2004
2. Dynamic fracture in single crystal silicon;Hauch;Phys Rev Lett,1999
3. Lattice trapping and surface reconstruction for silicon cleavage on (111). Ab-initio quantum molecular dynamics calculations;Spence;Acta Metall Mater,1993
4. On the fracture toughness measurement of thin film coated silicon wafers;Yang;Silicon,2014
5. Fracture anisotropy in silicon single crystal;Ebrahimi;Mater Sci Engng, A,1999
Cited by
7 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献