Author:
Saidoh Noriko,Takenaka Kana,Nishiyama Nobuyuki,Ishimaru Manabu,Inoue Akihisa
Subject
Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials,General Chemistry
Cited by
1 articles.
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1. Fabrication of nanodot array mold with 2 Tdot/in.2 for nanoimprint using metallic glass;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2012-11