A new radio-tracer technique for the evaporation study of light elements from molten silicon
Author:
Publisher
Elsevier BV
Subject
Radiology, Nuclear Medicine and imaging,Nuclear Energy and Engineering,Radiation
Reference6 articles.
1. Concentration and Behavior of Carbon in Semiconductor Silicon
2. Charged particle activation analysis for carbon, nitrogen and oxygen in semiconductor silicon
3. Ultratrace determination of oxygen and carbon by charged particle activation analysis
Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Chapter 3 Characterization Techniques for Oxygen in Silicon;Semiconductors and Semimetals;1994
2. Routine charged particle activation analysis of light elements;Journal of Radioanalytical and Nuclear Chemistry Articles;1993-02
3. Oxygen depth profiling by activation with the16O(3He, p,)18F reaction;Journal of Radioanalytical Chemistry;1982-03
4. Equilibrium of Carbon and Oxygen in Silicon with Carbon Monoxide in Ambient Atmosphere;Journal of The Electrochemical Society;1979-08-01
5. Charged-particle activation analysis studies on carbon, nitrogen and oxygen mainly in semiconductor silicon;Journal of Radioanalytical Chemistry;1976-03
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