Surface chemistry of materials deposition at atomic layer level
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference44 articles.
1. Atomic layer epitaxy
2. Atomic Layer Epitaxy;Suntola,1994
3. Atomic layer epitaxy (ALE) on porous substrates
4. Atomic layer growth of TiO2 on silica
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