Collision cascade limit to spatial resolution in focused ion beam processes-Reference-Cited by-同舟云学术

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Collision cascade limit to spatial resolution in focused ion beam processes

Published:1991-07 Issue:1-2 Volume:51 Page:103-112
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Betz G.,Rüdenauer F.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference18 articles.

1. Imaging microanalysis of surfaces with a focused gallium probe

2. Secondary Ion Mass Spectrometry — SIMS V;Levi-Setti,1986

3. High resolution scanning electron microscopy

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Nanoscale 3D Tomography by In-Flight Fluorescence Spectroscopy of Atoms Sputtered by a Focused Ion Beam;Nano Letters;2022-10-10

2. Mass Spectrometry in Semiconductor Research;Mass Spectrometry Handbook;2012-05-21

3. High Spatial Resolution Time-of-Flight Secondary Ion Mass Spectrometry for the Masses: A Novel Orthogonal ToF FIB-SIMS Instrument withIn SituAFM;Advances in Materials Science and Engineering;2012

4. Ion Beam Techniques;Handbook of Surface and Interface Analysis;2009-06-24

5. Advanced surface analysis of silicate glasses, oxides and other insulating materials: a review;Journal of Non-Crystalline Solids;1997-01

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