1. Chemical Vapor Deposition of Tungsten and Tungsten Silicides for VLSI/ULSI Applications;Schmitz,1991
2. Proc. 8th Int. IEEE VLSI Multilevel Interconnection Conf.;Norman,1991
3. Proc. 8th Int. IEEE VLSI Multilevel Interconnection Conf.;Ellwanger,1991
4. Proc. 8th Int. IEEE VLSI Multilevel Interconnection Conf.;Nishimura,1991
5. Chemical vapor deposition of titanium nitride at low temperatures