Author:
McClatchie S.,Thomas H.,Morgan D.V.
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Cited by
2 articles.
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1. Thin-Film Deposition Materials;Handbook of Chemicals and Gases for the Semiconductor Industry;2002-07-15
2. The reactive processing of silicides;JOM;1997-01