Investigation of capacitively coupled argon plasma driven at various frequencies and validation of surface waves excitation
Author:
Publisher
Elsevier BV
Subject
General Physics and Astronomy
Reference14 articles.
1. Principle of Plasma Discharges and Materials Processing;Lieberman,2005
2. Capacitively coupled glow discharges at frequencies above 13.56 MHz
3. Very high-frequency capacitively coupled argon discharges
4. Electron heating mode transition observed in a very high frequency capacitive discharge
5. Influence of Excitation Frequency on the Electron Distribution Function in Capacitively Coupled Discharges in Argon and Helium
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