Self-aligned local contact opening and n+ diffusion by single-step laser doping from POx/Al2O3 passivation stacks

Author:

Black Lachlan E.,Ernst Marco,Theeuwes RoelORCID,Melskens Jimmy,Macdonald DanielORCID,Kessels W.M.M.(Erwin)

Funder

Australian Renewable Energy Agency

Ministry of Economic Affairs of The Netherlands

Netherlands Organisation for Scientific Research

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Reference45 articles.

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3. 23.3% efficiency with laser processed IBC solar cells,;Dahlinger,2015

4. Fabrication of a 22.8% efficient back contact solar cell with localized laser-doping;Ernst;Phys. Status Solidi,2017

5. “Industrial silicon solar cells applying the passivated emitter and rear cell (PERC) concept—a review;Dullweber;IEEE J. Photovoltaics,2016

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1. Atomic-layer-deposited BOx/Al2O3 stack for crystalline silicon surface passivation;Solar Energy Materials and Solar Cells;2023-09

2. Review of Laser Doping and its Applications in Silicon Solar Cells;IEEE Journal of Photovoltaics;2023-05

3. POx/Al2O3 stacks for surface passivation of Si and InP;Solar Energy Materials and Solar Cells;2022-10

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5. POx/Al2O3 Stacks for c-Si Surface Passivation: Material and Interface Properties;ACS Applied Electronic Materials;2021-10-12

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