Silicon solar cells with nitrogen-rich SiNx/Si interfacial passivation by low-energy nitrogen-ion implantation-Reference-Cited by-同舟云学术

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Silicon solar cells with nitrogen-rich SiNx/Si interfacial passivation by low-energy nitrogen-ion implantation

Published:2021-01 Issue: Volume:220 Page:110858
ISSN:0927-0248
Container-title:Solar Energy Materials and Solar Cells
language:en
Short-container-title:Solar Energy Materials and Solar Cells

Author:

Sahu Rajkumar,Palei Srikanta,Choi Jaeho,Ji Hyung Yong,Kim Keunjoo

Funder

National Research Foundation

NRF

Ministry of Education

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Reference58 articles.

1. Silicon nitride at high deposition rate by hot wire chemical vapor deposition as passivating and antireflection layer on multicrystalline silicon solar cells;Vanderwerf;Thin Solid Films,2006

2. Detailed study of the composition of hydrogenated SiNx layers for high-quality silicon surface passivation;Mackel;J. Appl. Phys.,2002

3. Bulk and surface passivation of silicon solar cells accomplished by silicon nitride deposited on industrial scale by microwave PECVD;Soppe;Prog. Photovoltaics Res. Appl.,2005

4. Surface passivation of silicon by RF magnetron-sputtered silicon nitride films;Vetter;Thin Solid Films,1999

5. Characterization of Al2O3 surface passivation of silicon solar cells;Albadri;Thin Solid Films,2014

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Angle-resolved X-ray photoelectron spectroscopy intensity modeling of SiNx ultrathin layer grown on Si (100) and Si (111) substrates by N2 plasma treatment;Thin Solid Films;2024-06

2. Modeling and Control of SiNx Film Growth using the Kinetic Monte Carlo Method: Impact of Gas Flow Rate on Surface Roughness and Film Thickness;Silicon;2023-03-27

3. Amorphous carbon nitride dual-function anti-reflection coating for crystalline silicon solar cells;Scientific Reports;2022-06-14

4. The Optical and Thermo-Optical Properties of Non-Stoichiometric Silicon Nitride Layers Obtained by the PECVD Method with Varying Levels of Nitrogen Content;Materials;2022-03-18

5. Ion-implantation and photovoltaics efficiency: A review;Materials Letters;2022-02

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