Chemical microanalysis of semiconductor heterostructures by thickness fringe imaging

Author:

Glaisher Rob W.,Cockayne D.J.H.

Publisher

Elsevier BV

Subject

Cell Biology,Structural Biology,General Physics and Astronomy,General Materials Science

Reference16 articles.

1. Strain transfer between GaAs/InGaAs strained layers;Bangert;Micrsoc. Semicond. Mat. Inst. of Phys. Conf. Sers.,1989

2. Composition measurement by thickness fringe matching: the alloy-system-dependent sensitivity and accuracy of the method;Bithell;Phil. Mag. B,1991

3. Transmission and reflection microscopy on cleaved edges of III–V multilayered structures;Buffat,1989

4. Composition analysis of thin AlxGa1-xAs layers with TEM and SIMS;de Jong;J. Mat. Res.,1990

5. Compositional studies of semiconductor alloys by bright field electron microscope imaging of wedge crystals;Eaglesham;Mat. Res. Soc. Symp.,1987

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