Influences of tool tip geometry on surface/subsurface damage formation in nanoscratching of single-crystal 4H-SiC-Reference-Cited by-同舟云学术

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Influences of tool tip geometry on surface/subsurface damage formation in nanoscratching of single-crystal 4H-SiC

Published:2024 Issue: Volume:123 Page:185-190
ISSN:2212-8271
Container-title:Procedia CIRP
language:en
Short-container-title:Procedia CIRP

Author:

Huang Weihai,Yan Jiwang

Publisher

Elsevier BV

Reference20 articles.

1. Shape adaptive grinding of CVD silicon carbide;Beaucamp;CIRP Ann.,2014

2. Plasma assisted polishing of single crystal SiC for obtaining atomically flat strain-free surface;Yamamura;CIRP Ann.,2011

3. Nano-scale scratching in chemical–mechanical polishing;Saka;CIRP Ann.,2008

4. Deformation behaviour of soft-brittle polycrystalline materials determined by nanoscratching with a sharp indenter;Huang;Precis. Eng.,2021

5. Investigation of the anisotropy of 4H-SiC materials in nanoindentation and scratch experiments;Shi;Materials,2022

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