Selective growth of single-grain crystal in Al thin film by micron chevron-shaped laser beam scanning

Author:

Pham Anh HoangORCID,Yeh Wenchang,Morito Shigekazu,Ohba Takuya

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference17 articles.

1. High-Speed VLSI Interconnections;Goel,2007

2. Correlation between texture and mechanical stress durability of thin aluminum films;Nussl;Thin Solid Films,2014

3. Grain growth and the puzzle of its stagnation in thin films: the curious tale of a tail and an ear, Prog;Barmak,2013

4. Growth of highly textured aluminum films on LiTaO3 with optimized titanium intermediate layers;Nussl;Thin Solid Films,2011

5. Patterning of aluminum thin film on polyethylene terephthalate by multi-beam picosecond laser;Lin;Opt. Lasers Eng.,2015

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