Selective growth of single-grain crystal in Al thin film by micron chevron-shaped laser beam scanning
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference17 articles.
1. High-Speed VLSI Interconnections;Goel,2007
2. Correlation between texture and mechanical stress durability of thin aluminum films;Nussl;Thin Solid Films,2014
3. Grain growth and the puzzle of its stagnation in thin films: the curious tale of a tail and an ear, Prog;Barmak,2013
4. Growth of highly textured aluminum films on LiTaO3 with optimized titanium intermediate layers;Nussl;Thin Solid Films,2011
5. Patterning of aluminum thin film on polyethylene terephthalate by multi-beam picosecond laser;Lin;Opt. Lasers Eng.,2015
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1. Infinite lateral growth of (001) single crystal strip in Ge film on SiO2 by micro-chevron laser scanning method;Japanese Journal of Applied Physics;2024-01-04
2. Characteristics and deviation of low-temperature FD-SOI-MOSFETs using a sputtering SiO2 gate insulator;Japanese Journal of Applied Physics;2023-02-14
3. 34.2: Invited Paper: High performance single crystal Si TFTs fabricated on single crystal Si strip formed by micro‐chevron laser beam scanning;SID Symposium Digest of Technical Papers;2021-08
4. Rapid annealing of Au thin films by micron chevron-shaped laser beam scanning toward growth of single-grain crystal;Japanese Journal of Applied Physics;2021-02-09
5. Twin formation in micro-chevron laser beam scanning induced one directional crystal growth in Si film on SiO2;Japanese Journal of Applied Physics;2020-02-28
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