Author:
Ruiliang Song,Wei Liu,Yi Zhang,Yongan Cai,Yun Sun
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Cited by
1 articles.
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1. Analysis of magnetic field distribution in a cylindrical-type magnetron sputtering system;Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture;2013-04-09