Aluminum oxide barrier coating on polyethersulfone substrate by atomic layer deposition for barrier property enhancement
Author:
Funder
Kyung Hee University
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference16 articles.
1. Collimated magnetron sputter deposition
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4. Study on the characteristics of alumdinum thin films prepared by atomic layer deposition
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